KLA-Tencor Technical Support For 2100 Series Bright Field Tools
KLA-Tencor Models 21XX ISMIF, 2132, 2133, 2135, 2135XP, 2138, 2138XP, 2139, 25XX, 2552, ADC
Tool Installation, De-Installation, Tool Relocations
System Audits, Performance baselines, Pre-Upgrade System Qualification
Appraisals, Applications support
Preventative Maintenance (6 Week PM, Quarterly, Six Month & Annual PM)
Tier 3 & Tier 4 Technical Support, On-Site Escalation Support
2552 Wafer Defect Analysis Station Support
Optics Verifications
Stage Verifications and Repair
Yield Data Integration & Network Troubleshooting
ADC Processor & Managers supported
21XX Customer Operations Training and Level 1 Service Maintenance Training
Level 1 / 2 Training includes Customer Operations and Preventive Maintenance Training
Level 3 - Level 4 Advanced Stage And Optics Alignment Training Strictly Reserved only for KLA-Tencor Personnel
Disclaimer: KLA-Tencor is a registered trademark of KLA-Tencor Corporation
